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Femtosecond Laser Deposition of Diamond-Like Carbon Films

Published online by Cambridge University Press:  15 February 2011

F. Qian ,
R. K. Singh ,
S. Dutta ,
P.P. Pronko  and
W.H. Weber
F. Qian
Affiliation:
Department of Materials Science & Engineering, the University of Florida, Gainesville, FL 32611.
R. K. Singh
Affiliation:
Department of Materials Science & Engineering, the University of Florida, Gainesville, FL 32611.
S. Dutta
Affiliation:
Center for Ultrafast Optical Science, the University of Michigan, Ann Arbor, MI 48109.
P.P. Pronko
Affiliation:
Center for Ultrafast Optical Science, the University of Michigan, Ann Arbor, MI 48109.
W.H. Weber
Affiliation:
Ford Research Laboratory, Dearborn, MI 48121.
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Abstract

We have deposited unhydrogenated diamond-like carbon (DLC) films with 100 femtosecond laser pulses, at intensities in the 3x1014 - 6.5x1015 W/cm2 range. Film surface topography, optical property, and bonding structure were examined, respectively, with atomic force microscopy (AFM), spectroscopie ellipsometry (SE) and Raman spectrometry. The femtosecond pulse generated plasma was studied through time-of-flight (TOF) experiment. The most probable kinetic energy of carbon ions was estimated to be in the 300 – 2000 eV range, increasing with laser intensity. In addition, a unique ‘suprathermal’ component with kinetic energy ranging from 4 to 40 keV was observed in the TOF spectrum. This high energy peak is believed to originate from fast ions in a solid density plasma created during the absorption of each femtosecond laser pulse.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 297
Copyright
Copyright © Materials Research Society 1996

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References

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