Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-17T23:12:12.509Z Has data issue: false hasContentIssue false
  • English
  • Français

Femtosecond Laser Deposition of Diamond-Like Carbon Films

Published online by Cambridge University Press:  15 February 2011

F. Qian ,
R. K. Singh ,
S. Dutta ,
P.P. Pronko  and
W.H. Weber
F. Qian
Affiliation:
Department of Materials Science & Engineering, the University of Florida, Gainesville, FL 32611.
R. K. Singh
Affiliation:
Department of Materials Science & Engineering, the University of Florida, Gainesville, FL 32611.
S. Dutta
Affiliation:
Center for Ultrafast Optical Science, the University of Michigan, Ann Arbor, MI 48109.
P.P. Pronko
Affiliation:
Center for Ultrafast Optical Science, the University of Michigan, Ann Arbor, MI 48109.
W.H. Weber
Affiliation:
Ford Research Laboratory, Dearborn, MI 48121.
Get access

Abstract

We have deposited unhydrogenated diamond-like carbon (DLC) films with 100 femtosecond laser pulses, at intensities in the 3x1014 - 6.5x1015 W/cm2 range. Film surface topography, optical property, and bonding structure were examined, respectively, with atomic force microscopy (AFM), spectroscopie ellipsometry (SE) and Raman spectrometry. The femtosecond pulse generated plasma was studied through time-of-flight (TOF) experiment. The most probable kinetic energy of carbon ions was estimated to be in the 300 – 2000 eV range, increasing with laser intensity. In addition, a unique ‘suprathermal’ component with kinetic energy ranging from 4 to 40 keV was observed in the TOF spectrum. This high energy peak is believed to originate from fast ions in a solid density plasma created during the absorption of each femtosecond laser pulse.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 297
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Xiong, F., Wang, Y.Y., Leppert, V. and Chang, R.P.H., J. Mater. Res. 8, 2265 (1993).Google Scholar
2 Collins, C.B., Davanloo, F., Lee, T.J., You, J.H. and Park, H., Mat. Res. Soc. Symp. Proc. 285, 547(1993).Google Scholar
3 Marquardt, C.L., Williams, R.T., and Nagel, D.J., Mater. Res. Soc. Symp. Proc. 38, 325 (1985).Google Scholar
4 Stevefelt, J. and Collins, C.B., J. Phys. D. 24, 2149 (1991).Google Scholar
5 Liu, X., Ph.D. disssertation, the University of Michigan, (1994).Google Scholar
6 Joshi, C.J. and Corkum, P.B., Physics Today, 36, Jan 1995.Google Scholar
7 Müller, F., Mann, K., Simon, P., Bernstein, J.S. and Zaal, G.J., SPIE, 1858, 465 (1993).Google Scholar
8 Squier, J. and Mourou, G., Laser Focus World, June 1992;Google Scholar
9 Squire, J., Salin, F., Mourou, G., and Harter, D., Optics Letters, 16, 1965 (1991).Google Scholar
10 Qian, F., Singh, R., Dutta, S., Pronko, P., Appl. Phys. Lett. 67, 3120 (1995).Google Scholar
11 Demtröder, W. and Jantz, W., Plasma Physics, 12, 691 (1969).Google Scholar
12 Pappas, D.L., Saenger, K.L., Cuomo, J.J., and Dreyfus, R.W., J. Appl. Phys. 72, 3966 (1992).Google Scholar
13 Pronko, P.P., Dutta, S.K., Du, D. and Singh, R.K., J. Appl. Phys. 78, 6233 (1995).Google Scholar
14 Knight, D.S. and White, W.B., J. Mater. Res. 4, 385 (1989).Google Scholar