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The Application of Planar Laser-Induced Fluorescence as a Diagnostic in Plasma Processing

Published online by Cambridge University Press:  25 February 2011

J. K. Partin ,
J. R. Fincke ,
C. L. Jeffery ,
S. C. Snyder  and
J. A. Batdorf
J. K. Partin
Affiliation:
Idaho National Engineering Laboratory, EG&G Idaho, Inc.Idaho Falls, Idaho 83415
J. R. Fincke
Affiliation:
Idaho National Engineering Laboratory, EG&G Idaho, Inc.Idaho Falls, Idaho 83415
C. L. Jeffery
Affiliation:
Idaho National Engineering Laboratory, EG&G Idaho, Inc.Idaho Falls, Idaho 83415
S. C. Snyder
Affiliation:
Idaho National Engineering Laboratory, EG&G Idaho, Inc.Idaho Falls, Idaho 83415
J. A. Batdorf
Affiliation:
Idaho National Engineering Laboratory, EG&G Idaho, Inc.Idaho Falls, Idaho 83415
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Abstract

This paper reports an application of the planar laser-induced fluorescence (PLIF) technique to visualize species in a plasma jet. For the experiment, 10 μm manganese particles were injected through a center feed in the cathode of a 8 kW plasma torch. A tunable laser beam (−20 mJ/pulse) was focused by a cylinderical lens into a sheet, approximately 2.4 cm high and 550 μm thick, which passed through the center of the plasma plume, exciting manganese lying within the plane defined by the laser. The fluorescence generated was imaged onto a gated, intensified CID camera, converted to digital format, and processed by an image analyzer to form a 2-D map of the relative manganese vapor concentration within the plasma. The results of this proof-of-principle experiment demonstrate that the PLIF measurement holds considerable promise for obtaining simultaneous spatially resolved measurements of species concentration.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 149
Copyright
Copyright © Materials Research Society 1987

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References

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