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Study of Non-Aqueous Passivation on GaSb (100) Surfaces

Published online by Cambridge University Press:  01 February 2011

Z.Y. Liu
Affiliation:
Department of Chemical Engineering, University of Wisconsin-Madison, Madison, Wisconsin, 53706
T.F. Kuech
Affiliation:
Department of Chemical Engineering, University of Wisconsin-Madison, Madison, Wisconsin, 53706
D.A. Saulys
Affiliation:
Materials Research Science and Engineering Center, University of Wisconsin-Madison, Madison, Wisconsin, 53706
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Abstract

Due to the high chemical reactivity of GaSb surfaces, many commonly used aqueous sulfide passivation techniques lead to the growth of surface oxides that degrade device performance. We have developed a non-aqueous passivation regime consisting of Na2S/benzene/15-crown-5/oxidant. The use of a non-polar, aprotic organic medium required the addition of a specific chelating agent, i.e. a 15-crown-5 ether, to solubilize sodium sulfide, and organic oxidizing agents, such as anthraquinone and benzophenone, to act as electron acceptors. The surface optical and chemical properties of GaSb surfaces after aqueous and non-aqueous sulfide treatments were compared. Non-aqueous passivation resulted in higher PL intensity, lower oxide content, and a less amount of elemental Sb than aqueous passivation.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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