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The Role Of Ion Species On The Adhesion Enhancement Of ION Beam Mixed Fe/Al2O3 Systems
Published online by Cambridge University Press: 25 February 2011
Abstract
The role of the ion species on the adhesion enhancement of ion beam mixed Fe/Al2O3 systems has been investigated. The ion implantations were carried out after film deposition using Cr (300 keV), Fe (320 keV), or Ni (340 keV) ions. The adhesion of the films was measured by a pull test and a scratch test. While the three types of implantation result in similar ion concentration profiles (with the peak concentration at the interface) and similar damage profiles, the three species were not equally effective in improving the adhesion. The effects are proposed to be due to changes in the interfacial energy resulting from both the damage and the presence of the ion species at the interface.
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- Copyright © Materials Research Society 1992