Skip to main content Accessibility help
×
Home
Hostname: page-component-564cf476b6-z65vl Total loading time: 0.196 Render date: 2021-06-19T11:01:04.910Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true }

Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance

Published online by Cambridge University Press:  01 February 2011

Edgard Jeanne
Affiliation:
edgard.jeanne@st.com, Université de Tours, Laboratoire de Microélectronique de Puissance, Rue Pierre et Marie Curie - B.P. 7155, TOURS, 37071 TOURS CEDEX 2, France
Cyril Meynier
Affiliation:
cyril.meynier@univ-tours.fr, Université Francois Rabelais, LUSSI CNRS FRE 2448, Tours, 37000, France
Franck Teston
Affiliation:
franck.teston@univ-tours.fr, Université Francois Rabelais, LUSSI CNRS FRE 2448, Tours, 37000, France
Dominique Certon
Affiliation:
dominique.certon@univ-tours.fr, Université Francois Rabelais, LUSSI CNRS FRE 2448, Tours, 37000, France
Nicolas Felix
Affiliation:
nicolas.felix@vermon.com, Vermon SA, Tours, 37000, France
Mathieu Roy
Affiliation:
mathieu.roy@st.com, STMicroelectronics, R&D, Tours, 37071, France
Daniel Alquier
Affiliation:
daniel.alquier@univ-tours.fr, Université de Tours, Laboratoire de Microélectronique de Puissance, Tours, 37071, France
Get access

Abstract

For MEMS technology, reliability is of major concern. The implementation of a protection and passivation layer, that may easily enhance reliability of capacitive Micromachined Ultrasonic Transducers (cMUTs) must be done without degrading device performance. In this work, realization, simulation and characterization of passivated cMUT are presented. Two materials, SiNx and Parylene C, were selected with regard to their mechanical and physical properties as well as their compatibility with device processing. Particular attention was paid on layer deposition temperature to avoid a structural modification of the top aluminium electrode and, hence, a membrane bulge. The characterization results are in good agreement with the simulations. The SiN passivation layer clearly impact device performance while Parylene C effectiveness is clearly pointed out even through ageing characterizations. If SiNx layer can be used for passivation with particular precautions, Parylene is definitely an interesting material for cMUT passivation and protection.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below.

References

1 Felix, N., in Smart System Integration 2007, edited by Gessner, T., 99-105 (2007).Google Scholar
2 Belgacem, B., Yaakoubi, N., Jeanne, E., Roy, M., Jerisian, R., Alquier, D., Proc. Eurosensors XIX, WPb 28 (2005).Google Scholar
3 Ong, P. L., Wei, J., Tay, F., Iliescu, C., J. Phys.: Conference Series, 34, 764769 (2006).Google Scholar
4 Yao, T. J., Yang, X. and Tai, Y.-C., Sens. Actuators A, 98, 771–5 (2002).CrossRefGoogle Scholar
5 Yao, T. J., Parylene for MEMS applications, Ph.D. thesis, California Institute of Technology, CA, (2002).Google Scholar
6 Karnfelt, C., Tegnander, C., IEEE Trans. Microwave Theory and Techniques, 54, 8 (2006).Google Scholar
7 Chen, J. M and Zhao, J. J., Solid-State Integ. Circuit Tech., 569571 (2006).Google Scholar
8 Certon, D., Teston, F., Patat, F., cMUT Special Issue in IEEE-UFFC, 52, 12, 21992210 (2005).CrossRefGoogle Scholar
9 Belgacem, B., Alquier, D., Muralt, P., Baborowski, J., J. Micromech. Microeng., 14, 299304 (2004).CrossRefGoogle Scholar
10 Cianci, E., Schina, A., Minotti, A., Foglietti, V., Sens. Actuators A, 127, 8087 (2006).CrossRefGoogle Scholar
11 Attia, P., Hesto, P., Mat. Res. Soc. Symp. Proc., 518, 38 (1998).CrossRefGoogle Scholar
12 Belgacem, B., PhD. Thesis, Tours, France (2004).Google Scholar
13 Modlinski, R., Microelectron. Reliab., 44, 17331738 (2004).Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *