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Preparation of Pb-Based Ferroelectric thin films by Ion- and Photo-Assisted Deposition

Published online by Cambridge University Press:  25 February 2011

Shigenori Hayashi ,
Kenji Iijima  and
Takashi Hirao
Shigenori Hayashi
Affiliation:
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd. 3-15 Yagumo-nakamachi, Moriguchi, Osaka 570, Japan
Kenji Iijima
Affiliation:
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd. 3-15 Yagumo-nakamachi, Moriguchi, Osaka 570, Japan
Takashi Hirao
Affiliation:
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd. 3-15 Yagumo-nakamachi, Moriguchi, Osaka 570, Japan
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Abstract

Thin film process for Pb-based perovskite ferroelectrics has been investigated. Synthesis of epitaxial PLZT, PLT and PZT thin films by rfmagnetron sputtering in our laboratory was reviewed. Basic thin film process and applications were discussed. For further investigation, film preparation process was developed by co-deposition and assisted deposition techniques. The substrate temperature required for in-situ preparation of perovskite could be reduced to room temperature by an ion- and photoassisted co-evaporation technique.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 155
Copyright
Copyright © Materials Research Society 1992

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