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Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE)
Published online by Cambridge University Press: 01 February 2011
Abstract
Ultra-thin conformal polytetrafluoroethylene (PTFE) films were prepared by a novel physical vapor technique i.e., pulsed electron deposition (PED) technique. Prepared PTFE or Teflon thin films show high degree of conformity on patterned substrates. Under optimized deposition conditions the films exhibit superhydrophobicity. The PED processed films were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM) micrographs and the surface morphology and the conformal nature of the films were studied. The chemical nature and hydrophobicity were studied by FTIR and contact angle measurements, respectively.
- Type
- Research Article
- Information
- MRS Online Proceedings Library (OPL) , Volume 992: Symposium D – Deposition on Nonplanar Substrates , 2007 , 0992-D04-03
- Copyright
- Copyright © Materials Research Society 2007