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LP-MOCVD growth of GaAlN/GaN heterostructures on Silicon Carbide. Application to HEMT's devices.

Published online by Cambridge University Press:  01 February 2011

M-A. di Forte Poisson
Affiliation:
Thales Research & Technology / TIGER - Domaine de Corbeville - 91404 Orsay Cedex(France)
M. Magis
Affiliation:
Thales Research & Technology / TIGER - Domaine de Corbeville - 91404 Orsay Cedex(France)
M. Tordjman
Affiliation:
Thales Research & Technology / TIGER - Domaine de Corbeville - 91404 Orsay Cedex(France)
R. Aubry
Affiliation:
Thales Research & Technology / TIGER - Domaine de Corbeville - 91404 Orsay Cedex(France)
M. Peschang
Affiliation:
Thales Research & Technology / TIGER - Domaine de Corbeville - 91404 Orsay Cedex(France)
S. L. Delage
Affiliation:
Thales Research & Technology / TIGER - Domaine de Corbeville - 91404 Orsay Cedex(France)
J. di Persio
Affiliation:
Université de Lille - LSPES - 59655 Villeneuve d'Ascq(France)
B. Grimbert
Affiliation:
IEMN / TIGER - Avenue Poincaré - BP69 - 59652 Villeneuve d'Ascq cedex(France)
V. Hoel
Affiliation:
IEMN / TIGER - Avenue Poincaré - BP69 - 59652 Villeneuve d'Ascq cedex(France)
E. Delos
Affiliation:
IEMN / TIGER - Avenue Poincaré - BP69 - 59652 Villeneuve d'Ascq cedex(France)
D. Ducatteau
Affiliation:
IEMN / TIGER - Avenue Poincaré - BP69 - 59652 Villeneuve d'Ascq cedex(France)
C. Gaquiere
Affiliation:
IEMN / TIGER - Avenue Poincaré - BP69 - 59652 Villeneuve d'Ascq cedex(France)
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Abstract

This paper reports on the LP-MOCVD growth optimisation of GaAlN/GaN heterostructures grown on Silicon Carbide substrates for HEMT applications, and on the first device performances obtained with these structures. The critical impact of some growth parameters on the physical properties of the GaAlN/GaN epilayers has been identified and studied using High Resolution X-Ray diffraction (HR-XRD), AFM, C-V and sonogauge measurements. The SiC substrate surface preparation (both ex-situ and in-situ) and the nucleation layer growth conditions (growth temperature, thickness, composition and strain) have been found to be key steps of the GaAlN/GaN/SiC growth process. SiC substrates from different suppliers have been evaluated and their influence on the physical properties of the GaAlN/GaN HEMT structures investigated. Static characteristics of the devices such as maximum drain current Idss or pinch-off voltage have been correlated with the nucleation layer composition of the HEMT structure and the defect density of the SiC substrate. First devices measured at 10 GHz using a load pull system exhibited CW output power in excess of 2.8 W/mm for a gate length of 0.5 μm. Under static measurements, we found an Idss around 1 A/mm and a pinch-off voltage of –5 V.

Type
Research Article
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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