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Degradation Kinetics of Hydrogenated Amorphous Silicon: The Effect of Embedded Microcrystallites
Published online by Cambridge University Press: 10 February 2011
Abstract
We have studied the degradation kinetics of undoped a-Si:H films which contain a significant fraction of silicon microcrystallites. The degradation rate is found to be exceptionally slow in the first stage of degradation, then the defect density follows the “normal” t1/3rate and finally saturates. We present a model which relates this abnormal kinetics to the microcrystallites which are embedded in the amorphous matrix.
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- Copyright © Materials Research Society 1998