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Analysis of thermodynamic conditions to grow GaAsP epitaxial layers by LPE on GaAs and GaP substrates

Published online by Cambridge University Press:  28 October 2020

Juan Adrián Galván Montalvo
Affiliation:
Instituto de Investigación en Comunicación Óptica, Universidad Autónoma de San Luis Potosí, Av. Karakorum 1470 Lomas 4ª, C.P.78210, San Luis Potosí, SLP, México
Claudia Verónica Silva Juárez
Affiliation:
Instituto de Investigación en Comunicación Óptica, Universidad Autónoma de San Luis Potosí, Av. Karakorum 1470 Lomas 4ª, C.P.78210, San Luis Potosí, SLP, México
Víctor Hugo Compeán Jasso
Affiliation:
Instituto de Investigación en Comunicación Óptica, Universidad Autónoma de San Luis Potosí, Av. Karakorum 1470 Lomas 4ª, C.P.78210, San Luis Potosí, SLP, México
Francisco De Anda Salazar
Affiliation:
Instituto de Investigación en Comunicación Óptica, Universidad Autónoma de San Luis Potosí, Av. Karakorum 1470 Lomas 4ª, C.P.78210, San Luis Potosí, SLP, México
Viatcheslav Michournyi
Affiliation:
Instituto de Investigación en Comunicación Óptica, Universidad Autónoma de San Luis Potosí, Av. Karakorum 1470 Lomas 4ª, C.P.78210, San Luis Potosí, SLP, México
Andrei Gorbatchev*
Affiliation:
Instituto de Investigación en Comunicación Óptica, Universidad Autónoma de San Luis Potosí, Av. Karakorum 1470 Lomas 4ª, C.P.78210, San Luis Potosí, SLP, México
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Abstract

In this work we have analysed the conditions to grow epitaxial layers by Liquid Phase Epitaxy (LPE) from ternary Ga-As-P liquid phases on GaAs and GaP under initial conditions that are far away of the thermodynamic equilibrium. First, it is shown that the liquid-solid (L-S) interfaces are “stable” for all compositions of the liquid phases exclusively in contact with the GaP substrates. At the same time the elastic energy generated in mismatched GaAsyP1-y layers induces a reduction in the As content of the layer. Then, it should be expected that highly lattice mismatched epitaxial layers could be grown with small elastic energy, so that beyond certain stress the layers are initially non-planar having spatially separated but simultaneous local centres of nucleation and dissolution pits. These processes should cause a change on the composition of the liquid phase and, as consequence, the formation of the epitaxial islands with a composition gradient along its thickness. Our estimations show that in the case of contact of a Ga-As liquid phase with a GaP substrate the P content in the epitaxial islands increases with its thickness. The thermodynamic analysis was done with the CALPHAD method using SGTE data.

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Articles
Copyright
Copyright © The Author(s), 2020, published on behalf of Materials Research Society by Cambridge University Press

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