An R&D project of large scale ion beam equipment and processing is being carried out from 1986 till 1994. The project includes R&D of five ion beam systems and three material processes for surface modification. The five equipment R&D projects are:
(1)High current metal ion beam system,
(2)Integrated high current ion beam system,
(3)Ionized multiple beam system with high deposition rate,
(4)High energy ion beam system,
(5)Gas-phase focused ion beam system.
The three materials processing R&D projects are:
(1)Glass surface modification,
(2)Metal surface modification,
(3)Low scattering multilayer film deposition. This paper reviews recent progress on development of the project. This work was conducted in the program: ’Advanced Material Processing and Machining System’ consigned to AMMTRA from the New Energy and Industrial Technology Development Organization, which is carried out under the Industrial Science and Technology Frontier Program enforced by the Agency of Industrial Science and Technology of Japan.