Hostname: page-component-745bb68f8f-cphqk Total loading time: 0 Render date: 2025-01-15T14:48:35.005Z Has data issue: false hasContentIssue false
  • English
  • Français

Solvent diffusion in porous low-k dielectric films

Published online by Cambridge University Press:  01 February 2011

Denis Shamiryan  and
Karen Maex
Denis Shamiryan
Affiliation:
IMEC, Kapeldreef 75, Leuven, 3001, Belgium, also at Electrical Engineering department of K.U.Leuven
Karen Maex
Affiliation:
IMEC, Kapeldreef 75, Leuven, 3001, Belgium, also at Electrical Engineering department of K.U.Leuven
Get access

Abstract

Porous materials are being investigated as low dielectric constant (low-k) materials. While porosity decreases the k-value of a material by decreasing its density, it simultaneously allows unwanted adsorption and diffusion of chemicals inside the porous matrix. To investigate this, different porous low-k materials, specifically silicon oxycarbide (SiOCH), methylsilsesquioxane (MSQ), and a polymer, were exposed to polar (ethanol) and non-polar (toluene) solvents. A difference in diffusion of polar and non-polar solvents would be an indication of the density of polar centers which attract polar molecules (such as water) and increase the dielectric constant of a film. The diffusion coefficient for toluene at room temperature was found to be approximately 2×10-5 cm2/sec for MSQ (40% porosity), 10-7 cm2/sec for SiOCH (7% porosity), 2×10-8 cm2/sec for the polymer. The observed diffusion can be described by a model of a viscous flow in a porous medium. The toluene/ethanol diffusion coefficient ratios were 4.4, 1.3, 1 for MSQ, SiOCH, and the polymer, respectively. The difference in toluene/ethanol diffusion can potentially be used to screen a material's affinity for water adsorption.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 766: Symposium E – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2003 , 2003 , E9.11
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Maex, K., Baklanov, M. R., Shamiryan, D., Iacopi, F., Brongersma, S. H., and Yanovitskaya, Z. S., J. Appl. Phys. 93, (2003) (in press).Google Scholar
2. Snyder, L. R. and Kirkland, J. J.. Introduction to modern liquid chromatography. 2-nd edition, (A Wiley-Interscience Publication, New York, 1979).Google Scholar
3. Snyder, L. R.. Principles of adsorption chromatography, (Dekker, New York, 1968).Google Scholar
4. Shamiryan, D., Baklanov, M. R., Vanhaelemeersch, S., and Maex, K., Electrochem. Sol. St. Lett. 4, F3 (2001).Google Scholar
5. Dultsev, F. N. and Baklanov, M. R., Electrochem. Sol. St. Lett. 2, 192 (1999).Google Scholar
6. Vereecke, G., Kondoh, E., Richardson, P., Maex, K., Heyns, M. M. and Nényei, Z.. IEEE Trans. Semicond. Manuf. 13, 315 (2000).Google Scholar
7. Atkins, P. W.. Physical Chemistry. 6th edition, (Oxford university press, 1998) p.753.Google Scholar
8. Rouquerol, J., Avnir, D., Fairbridge, C. W., Everett, D. H., Haynes, J. H., Pernicone, N., Ramsay, J. D. F., Sing, K. S. W. and Unger, K. K.. Pure & Appl. Chem. 66, 1739 (1994).Google Scholar
9. Do, D. D.. Adsorption analysis: equilibria and kinetics. Series on chemical engineering, vol.2, (Imperial College Press, London, 1998) p.374.Google Scholar
10.ibid ref. 9, p.398.Google Scholar