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Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth

Published online by Cambridge University Press:  17 March 2011

Anne Lauwers ,
Richard Lindsay ,
Kirklen Henson ,
Simone Severi ,
Amal Akheyar ,
Bartek J. Pawlak ,
Muriel de Potter  and
Karen Maex
Anne Lauwers
Affiliation:
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Richard Lindsay
Affiliation:
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Kirklen Henson
Affiliation:
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Simone Severi
Affiliation:
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Amal Akheyar
Affiliation:
Affiliate researcher at IMEC from Infineon
Bartek J. Pawlak
Affiliation:
Philips Research Leuven
Muriel de Potter
Affiliation:
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Karen Maex
Affiliation:
IMEC, Kapeldreef 75, 3001 Leuven, Belgium
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Abstract

Making use of SPER (Solid Phase Epitaxial Regrowth) As and B deep source/drain junctions with high activation can be obtained at temperatures below 700°C. However, higher thermal budget is required to regrow and activate the dopants in the poly gates. Low junction leakage and low contact resistance can be obtained for Ni-silicided As and B SPER junctions making use of deep As and B implants. Because of the low thermal budget source/drain junctions obtained by SPER are an attractive alternative to conventional spike annealed junctions for technologies making use of metal gates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 810: Symposium C – Silicon Front-End Junction Formation-Physics and Technology , 2004 , C2.2
Copyright
Copyright © Materials Research Society 2004

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References

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