The Center for Electron Microscopy of Materials Science (EMAT) at the University of Antwerp, Belgium, started in 1967 under the initiative of S. Amelinckx. While most materials science laboratories choose a particular research theme (e.g., superconducting materials) and study it through several available techniques, the EMAT group at Antwerp has taken a different approach. From the beginning, EMAT has concentrated on a single technique: transmission electron microscopy. Since the laboratory, as well as the university, is very small, we felt it would be better to be excellent in a single technique than to have limited proficiency in several techniques. Until recently, EMAT has been able to maintain this strategy, although the group has grown considerably; at present it consists of four academic staff members, four postdocs, and 12 PhD students, supported by a technical and administrative staff of eight people.
Instrumentation at EMAT
The range of electron microscopes and related instruments in the EMAT laboratory is quite extensive and includes several instruments dedicated to specific techniques. The instruments include:
∎ A 1,250 kV high-voltage electron microscope, used mainly for studying processed semiconductor devices and for in situ radiation experiments.
∎ A 400 kV and a 200 kV high-resolution electron microscope with resolving powers of 1.7 Å and 2.5 Å, respectively. Both instruments are equipped with a TV imaging system and a video camera.
∎ A 200 kV and a 100 kV analytical electron microscope with large tilting possibilities, cooling and heating facilities, and capability for energy dispersive x-ray analysis for measuring the local composition.