12 results
Integrated Rapid Thermal CVD Processing Solutions for 0.18–0.25μm Technologies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 215
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- 1997
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Cobalt and Titanium Metallization of SiGeC for Shallow Contacts
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- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 529
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- 1996
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Heteroepitaxial Si1-x-yGex Cy Layer Growth on (100)Si by Atmospheric Pressure Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 399 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 117
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- 1995
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Wet Oxidation of Si1-x-yGexCy Layers on (100) Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 398 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 625
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- 1995
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X-Ray Diffraction Analysis of the Strain of SiGeC/(100)Si Alloys
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- Journal:
- MRS Online Proceedings Library Archive / Volume 399 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 461
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- 1995
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Kinetics of Copper Grain Growth During Nitridation of Cu-Cr and Cu-Ti Thin Films by In Situ Tem
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 625
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- 1994
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Interfacial Reactions of Copper/Refractory Alloy and Bilayer Films on Si02
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 631
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- 1994
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Strain Measurements of Sigec Heteroepitaxial Layers On Si(100) Using Ion Beam Analysis+
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 461
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- 1994
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In Situ Studies of Nitridation of Cu/Ti Thin Films Using Environmental Cell in Transmission Electron Microscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 317 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 251
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- 1993
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An in Situ Transmission Electron Microscopy Study During NH3 Ambient Annealing of Cu-Cr Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 317 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 245
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- 1993
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Visualization of Ion Channeling of (100)Si and Si1-xGex Epitaxial Grown Layers on Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 679
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- 1993
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Sb Implantation in Si1–xGex/Si(100) Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 247
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- 1991
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