6 results
Cu CMP and its Challenge for 20nm Nodes and Beyond
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1428 / 2012
- Published online by Cambridge University Press:
- 30 July 2012, mrss12-1428-c06-03
- Print publication:
- 2012
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Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B03-15
- Print publication:
- 2007
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Evaluation of the modified edge lift-off test for adhesion characterization in microelectronic multifilm applications
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 2 / February 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 385-393
- Print publication:
- February 2001
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Characterization of Spin -on Glasses by Microindentation.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 157
- Print publication:
- 1998
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Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 33
- Print publication:
- 1998
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Stress-Corrosion Cracking of Spin-on Glass Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 171
- Print publication:
- 1998
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