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Characterization of Spin -on Glasses by Microindentation.

  • Eva E. Simonyi (a1), K.-W. Lee (a1), Robert F. Cook (a1), Eric G. Liniger (a1) and James Speidell (a1)...

Abstract

Spin-on glasses are candidates in the microelectronics industry as low dielectric constant insulating layers. Spin-on glasses are very brittle materials. This paper discusses measurement problems as relevant to the characterization of a brittle material by the indentation technique. As for all polymeric materials curing temperature is the most important preparation parameter. There is a correlation between hardness, Young's modulus, the onset of cracking with curing temperature. This dependence on curing temperature is also expressed by the change in Si-H bond density as shown by FTIR data. Life expectancy or aging characteristics were also investigated for these features. As an example results on silsesquioxane spin -on glasses are presented.

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Characterization of Spin -on Glasses by Microindentation.

  • Eva E. Simonyi (a1), K.-W. Lee (a1), Robert F. Cook (a1), Eric G. Liniger (a1) and James Speidell (a1)...

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