13 results
Superhydrophobic Silicon Surfaces with Low Light Reflectivity
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1158 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1158-F03-07
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- 2009
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Sol-Gel Process Derived Superhydrophobic Silica Thin Films for Antistiction of MEMS Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B05-02
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- 2007
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Assembly of Fine-Pitch Carbon Nanotube Bundles for Electrical Interconnect Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B10-01
- Print publication:
- 2007
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Low Temperature Plasma Etching of Copper for Minimizing Size Effects in sub-100 nm Features
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F09-08
- Print publication:
- 2006
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Novel Approaches to Nanopatterning: From Surface Monolayer Initiated Polymerization to Hybrid Organometallic-Organic Bilayers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 705 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, Y2.6
- Print publication:
- 2001
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Deposition and Etching of Amorphous Carbon Films Prepared by ECR-Plasma-Enhanced Benzene Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 555 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 315
- Print publication:
- 1998
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Helical Resonator Plasma Oxidation of Amorphous and Polycrystalline Silicon for Flat Panel Displays
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- Journal:
- MRS Online Proceedings Library Archive / Volume 424 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 165
- Print publication:
- 1996
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Thin Film Processing with Ecr and Downstream Oxygen Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 236 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 191
- Print publication:
- 1991
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Plasma Deposited Silicon Nitride Film Chemistry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 165 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 79
- Print publication:
- 1989
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Ion Current, Energy Distribution, and Radical Species Detection in RF Plasmas by Cylindrical Mirror Analyzer Quadrupole Mass Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 117 / 1988
- Published online by Cambridge University Press:
- 22 February 2011, 61
- Print publication:
- 1988
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Deposition Chemistry and Structure of Amorphous Fluorinated Silicon Nitride
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- Journal:
- MRS Online Proceedings Library Archive / Volume 118 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 67
- Print publication:
- 1988
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A 29Si-NMR Investigation of Amorphous Hydrogenated Silicon Nitride
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- Journal:
- MRS Online Proceedings Library Archive / Volume 70 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 337
- Print publication:
- 1986
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Plasma-Enhanced Chemical Vapor Deposition of Metal and Metal Silicide Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 38 / 1984
- Published online by Cambridge University Press:
- 21 February 2011, 315
- Print publication:
- 1984
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