Research Article
Defects and Diffusion issues for the Manufacturing of Semiconductors in the 21st Century
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Point Defects, Diffusion and Gettering in Silicon
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Diffusion of Gold into Heavily Boron-Doped Silicon
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Nonhydrostatic Stress Effects on Boron Diffusion in SI
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Point Defect Properties from Metal Diffusion Experiments — What Does the Data Really Tell Us?
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Room-Temperature Migration of Ion-Implanted Boron in Silicon
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Anomalous Diffusion of Ultra low Energy Boron Implants in Silicon
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Interstitial Silicon Sink Efficiency of Dislocations Studied by Gold Diffusion in FZ and Cz Samples
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Study of Point Defect Concentrations During the Fluorinated Oxidation of Silicon
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High Silicon Self-Interstitial Diffusivity as Revealed by Lithium Ion Drifting
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An Examination of the Crystalline Quality of 200mm Diameter Silicon Substrates using X-ray Topography
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Identification of Microdefects in Multicrystalline Silicon
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Oxygen Gettering and Thermal Donor Formation at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
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The Conversion of Czochralski Silicon from P-Type to N-Type by Hydrogen Plasma Enhanced Thermal Donor Formation
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Kinetic Model of Thermal Donor Evolution
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Effect of Atomic Bonding on Defect Production in Collision Cascades
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Ring-Related Defects in MCZ Wafer Comparison by Electrical, Structural, and Device Properties
- Published online by Cambridge University Press: 15 February 2011, 119
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Diffusion of Silicon Interstitials in thin Silicon Films on Insulator in Neutral and Oxidising Annealing Ambients
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Point Defect Injection Kinetics by N2O Oxidation of Silicon
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Native Defects and their Interactions with Impurities in Silicon
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