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7 - Practical MEMS devices
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Appendix B - Review of mechanical resonators
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9 - Electromechanics of magnetic MEMS devices
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Appendix C - Micromachining
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Frontmatter
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Appendix A - Review of quasistatic electromagnetics
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3 - Capacitive lumped parameter electromechanics
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2 - Circuit-based modeling
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8 - Electromechanics of piezoelectric elements
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6 - Distributed 1-D and 2-D capacitive electromechanical structures
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5 - Capacitive sensing and resonant drive circuits
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4 - Small-signal capacitive electromechanical systems
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Contents
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1 - Introduction
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Index
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Preface
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Part 1 - Transmission lines using a distributed equivalent circuit
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- Transmission Lines
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3 - Coupled transmission lines and circuits
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1 - Pulses on transmission lines
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2 - Sine waves and networks
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