Book contents
- Frontmatter
- Contents
- Preface
- 1 Introduction
- 2 Circuit-based modeling
- 3 Capacitive lumped parameter electromechanics
- 4 Small-signal capacitive electromechanical systems
- 5 Capacitive sensing and resonant drive circuits
- 6 Distributed 1-D and 2-D capacitive electromechanical structures
- 7 Practical MEMS devices
- 8 Electromechanics of piezoelectric elements
- 9 Electromechanics of magnetic MEMS devices
- Appendix A Review of quasistatic electromagnetics
- Appendix B Review of mechanical resonators
- Appendix C Micromachining
- Appendix D A brief review of solid mechanics
- Index
- References
7 - Practical MEMS devices
Published online by Cambridge University Press: 05 May 2013
Book contents
- Frontmatter
- Contents
- Preface
- 1 Introduction
- 2 Circuit-based modeling
- 3 Capacitive lumped parameter electromechanics
- 4 Small-signal capacitive electromechanical systems
- 5 Capacitive sensing and resonant drive circuits
- 6 Distributed 1-D and 2-D capacitive electromechanical structures
- 7 Practical MEMS devices
- 8 Electromechanics of piezoelectric elements
- 9 Electromechanics of magnetic MEMS devices
- Appendix A Review of quasistatic electromagnetics
- Appendix B Review of mechanical resonators
- Appendix C Micromachining
- Appendix D A brief review of solid mechanics
- Index
- References
Summary
Introduction
In the previous chapters, we have investigated lumped parameter electromechanical conversion, linear multiport representations for actuators and sensors, and the effects of external constraints on transducer response. We used a powerful electromechanical analog to synthesize circuit models for transducers, examined the signal conditioning and amplification stages needed to turn MEMS devices into practical systems, and finally developed a methodology to represent mechanical continua, viz., beams and plates, as lumped parameter systems. We are now ready to put these modeling tools to use in the analysis of some practical MEMS devices.
This chapter provides concise system-level technical presentations of four important MEMS applications: pressure sensors, accelerometers, gyroscopes, and energy harvesters. These applications have been selected according to diverse criteria. For example, pressure sensors, relatively uncomplicated as MEMS go, were among the first types of sensors and actuators to be miniaturized. MEMS accelerometers, more complicated than pressure sensors, are very widely used in automotive airbag systems. Micro-mechanical gyroscopes, now available commercially, are considerably more complex than accelerometers, with respect to both the dynamics and the system-level electromechanical drive–sense scheme needed to make them work. Finally, the MEMS energy harvester is included because it is a concept that shows great promise but needs further development before real market penetration can occur.
- Type
- Chapter
- Information
- Electromechanics and MEMS , pp. 298 - 371Publisher: Cambridge University PressPrint publication year: 2013
References
and , Micromachined pressure sensors: review and recent developments. Smart Materials and Structures, 6 (1997), 530–539.CrossRefGoogle Scholar
, Micro Mechanical Transducers: Pressure Sensors, Accelerometers, and Gyroscopes. (Amsterdam: Elsevier, 2000).Google Scholar
, Transducers and Their Elements: Design and Application. (Englewood Cliffs, NJ: PTR Prentice Hall, 1994).Google Scholar
, , and , A high-sensitivity integrated-circuit capacitive pressure transducer. IEEE Transactions on Electron Devices, 29 (1982), 48–56.CrossRefGoogle Scholar
, , and , Micromachined inertial sensors. Proceedings of the IEEE, 86 (1998), 1640–1659.CrossRefGoogle Scholar
, , , and , A 3-axis force balanced accelerometer using a single proof-mass. International Conference on Solid State Sensors and Actuators, TRANSDUCERS '97 Chicago, 2 (1997), 1185–1188.CrossRefGoogle Scholar
, , and , An electrostatic servo-type three-axis silicon accelerometer. Measurement Science and Technology, 6 (1995), 11.CrossRefGoogle Scholar
, Silicon as a mechanical material. Proceedings of the IEEE, 70 (1982), 420–457.CrossRefGoogle Scholar
and , Rate and Attitude Indicating Instrument. United States Patent US 2,309,853. 1943Google Scholar
and , Gyrodynamics and its Engineering Applications. (New York: Academic Press, 1961).Google Scholar
and , Hemispherical Resonator Gyro- Status Report and Test Results, Institute of Navigation, National Technical Meeting, San Diego, CA. (17–19 Jan. 1984), pp. 105–107.Google Scholar
and , A HARPSS polysilicon vibrating ring gyroscope. Journal of Microelectromechanical Systems, 10 (2001), 169–179.CrossRefGoogle Scholar
, , , et al., A micromachined comb-drive tuning fork rate gyroscope. Micro Electro Mechanical Systems, 1993, MEMS ’93, Proceedings and Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE. (1993), 143–148.
and , High-frequency capacitive disk gyroscopes in (100) and (111) silicon. MEMS, IEEE 20th International Conference on Micro Electro Mechanical Systems (2007), 47–50.
, Dynamics of Mechanical and Electromechanical Systems. (New York: McGraw-Hill, 1968).Google Scholar
, , and , Micromachined vibratory rate gyroscope. United States Patent US 6,067,858, 2000.
and , Inertial sensor technology trends, IEEE Sensors Journal, 1 (2001), 332–339.CrossRefGoogle Scholar
, , and , Energy harvesting vibration sources for microsystems applications. Measurement Science and Technology, 17 (2006), R175.CrossRefGoogle Scholar
and , Analysis of a micro-electric generator for microsystems. Sensors and Actuators A, 52 (1996), 8–11.CrossRefGoogle Scholar
, Energy-Harvesting Charger and Protector. MAX17710 (2011).
, , , et al., Development of an electrostatic generator that harnesses the motion of a living body: use of a resonant phenomenon. JSME International Journal. Series C, Mechanical Systems, Machine Elements and Manufacturing, 43 (2000), 916–922.CrossRefGoogle Scholar
, , , , and , Vibration-to-electric energy conversion. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 9 (2001), 64–76.CrossRefGoogle Scholar
, , , , and , Development of an electrostatic generator for a cardiac pacemaker that harnesses the ventricular wall motion. Journal of Artificial Organs, 5 (2002), 239–245.CrossRefGoogle Scholar
, , , et al., Analysis and optimisation of MEMS electrostatic on-chip power supply for self-powering of slow-moving sensors. Proc. Eurosensors XVII, Guimaraes, Portugal. (21–24 Sept 2003), pp. 492–495.
, , , and , Power extraction from ambient vibration. Proc. SeSens (Workshop on Semiconductor Sensors) (2002), pp. 680–683.
, , , , and , Novel design and fabrication of a MEMS electrostatic vibration scavenger. Proceedings PowerMEMS (2004), pp. 18–21.
, Energy Scavenging for Wireless Sensor Nodes with a Focus on Vibration to Electricity Conversion, Ph.D. thesis, University of California at Berkeley (2003).
and , Investigation of a resonance microgenerator. Journal of Micromechanics and Microengineering, 13 (2003), 209.CrossRefGoogle Scholar
, , , et al., Electric-energy generation using variable-capacitive resonator for power-free LSI: Efficiency analysis and fundamental experiment. Proceedings of the 2003 International Symposium on Low Power Electronics and Design (2003), pp. 193–198.
, , and , Dynamic simulation of an implemented electrostatic power micro-generator, Proceedings of Design, Test, Integration and Packaging of MEMS/ΣMEΟM (2005), pp. 380–385.
, , and , Micro seismic power generator using electret polymer film, Proceedings PowerMEMS, (2004), pp. 187–190.
, , , et al., Fabrication and characterization of high damping electrostatic micro devices for vibration energy scavenging, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2005), June 1–3, Montreux: Switzerland (2005), pp. 386–90.
and , Design and optimization of a MEMS electret-based capacitive energy scavenger, Journal of Microelectromechanical Systems, 14 (2005), 429–435.CrossRefGoogle Scholar
, Vibration of Plates, Reprinted edn. [SI]. (Acoustical Society of America through the American Institute of Physics, 1993).Google Scholar
, , , and , Comments on the size effect on the microcantilever quality factor in free air space, Journal of Micromechanics and Microengineering, 17 (2007), 139.CrossRefGoogle Scholar
- 1
- Cited by