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32 results

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  • Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering
  • Masahiro Kawasaki, Masateru Nose, Ichiro Onishi, Makoto Shiojiri
  • Journal: Microscopy and Microanalysis / Volume 22 / Issue 3 / June 2016
  • Published online by Cambridge University Press: 12 April 2016, pp. 673-678
  • Print publication: June 2016
  • View abstract

    AlN/SiOx nanocomposite coatings fabricated by differential pumping cosputtering (DPCS) were investigated by analytical electron microscopy. The DPCS system consists of two halves of a Chamber, A and B, for radio frequency (RF) magnetron sputtering deposition of different materials, and a substrate holder that rotates through the chambers. Al and SiO2 were sputtered in gas environments with a flow mixture of N2 and Ar gases at RF power of 200 W in the Al Chamber A and a flow of Ar gas at RF powers of 49 W in the SiO2 Chamber B. The substrates of (001) Si wafers heated at 250°C were rotated for 1,080 min at 3 rpm and alternately deposited by AlN and SiO2. AlN columnar crystals grew at a rate of ~0.3 nm/revolution preferentially along the hexagonal [0001] axis. Amorphous silicon oxide (a-SiOx), deposited at a rate of ~0.2 nm/revolution, was coagulated preferentially along the boundaries between the AlN columns and also the interfaces between the subgrains within the AlN columns. The a-SiOx played an important role in the increase in mechanical hardness of the AlN/SiOx composite coating by disturbing deformation of AlN crystal lattices.

  • Magnetic Imaging with a Novel Hole-Free Phase Plate
  • Shawn Pollard, Marek Malac, Marco Beleggia, Masahiro Kawasaki, Yimei Zhu
  • Journal: Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
  • Published online by Cambridge University Press: 27 August 2014, pp. 250-251
  • Print publication: August 2014
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