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Simple and Compact Electrostatic Cs-Corrector using Annular and Circular Electrodes

Published online by Cambridge University Press:  25 July 2016

Tadahiro Kawasaki ,
Takafumi Ishida ,
Tetsuji Kodama ,
Masahiro Tomita ,
Takaomi Matsutani  and
Takashi Ikuta
Tadahiro Kawasaki
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan
Takafumi Ishida
Affiliation:
Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan
Tetsuji Kodama
Affiliation:
Graduate School of Science & Technology, Meijo University, Nagoya, Japan
Masahiro Tomita
Affiliation:
Vacuum Device Ltd., Mito, Japan
Takaomi Matsutani
Affiliation:
Faculty of Science and Engineering, Kinki University, Higashiosaka, Japan
Takashi Ikuta
Affiliation:
Faculty of Engineering, Osaka Electro-Communication University, Neyagawa, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 338 - 339
Copyright
© Microscopy Society of America 2016 

References

[1] Rose, H. Optik 85 (1990) 19–24.Google Scholar
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[3] Krivanek, O. L., et al., Inst. Phys. Conf 153 (1997) 35.Google Scholar
[4] Kawasaki, T., et al., Proc. ALC (27p-P-58 2015.Google Scholar