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Spherical Aberration Correction for SEMs with Electrostatic-type Compact Cs-corrector

Published online by Cambridge University Press:  01 August 2018

Tadahiro Kawasaki ,
Ryuji Yoshida ,
Takeharu Kato ,
Tsunenori Nomaguchi ,
Shunichi Motomura ,
Kenichi Nishinaka ,
Toshihide Agemura ,
Masahiro Tomita  and
Takashi Ikuta
Tadahiro Kawasaki
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Ryuji Yoshida
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Takeharu Kato
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Tsunenori Nomaguchi
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Shunichi Motomura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Kenichi Nishinaka
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Toshihide Agemura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Masahiro Tomita
Affiliation:
Vacuum Device Ltd., Mito, Japan
Takashi Ikuta
Affiliation:
Faculty of Engineering, Osaka Electro-Communication University, Neyagawa, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 152 - 153
Copyright
© Microscopy Society of America 2018 

References

[1] Haider, M., et al, Optik 99 1995) p. 167.Google Scholar
[2] Kawasaki, T., et al, Suf. Int. Anal 48 2015) p. 1160.Google Scholar
[3] Kawasaki, T., et al PCT/JP2016/053691.Google Scholar
[4] This development was supported by SENTAN, JST.Google Scholar