19 results
Texture in Ti/Al and Nb/Al multilayer thin films: Role of Cu
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 5 / May 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1449-1459
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- May 2001
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Characterization of Thin Dielectric Films as Copper Diffusion Barriers Using Triangular Voltage Sweep
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- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 189
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- 1999
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Characterization of Thin Dielectric Films as Copper Diffusion Barriers using Triangular Voltage Sweep
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- MRS Online Proceedings Library Archive / Volume 564 / 1999
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- 10 February 2011, 551
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- 1999
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Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films
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- MRS Online Proceedings Library Archive / Volume 562 / 1999
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- 10 February 2011, 223
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- 1999
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In-Situ Study of Ti/TiN Stability under Nitrogen Anneal
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- MRS Online Proceedings Library Archive / Volume 564 / 1999
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- 10 February 2011, 465
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- 1999
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Characterization of Plated Cu Thin Film Microstructures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 562 / 1999
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- 10 February 2011, 209
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- 1999
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Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films
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- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 387
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- 1999
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Characterization of Plated Cu Thin Film Microstructures
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- MRS Online Proceedings Library Archive / Volume 564 / 1999
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- 10 February 2011, 373
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- 1999
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Crystallographic Texture and Phase Formation in Blanket TifriN/AICu Films
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- MRS Online Proceedings Library Archive / Volume 514 / 1998
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- 10 February 2011, 105
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- 1998
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Dependence of Crystallographic Texture of C54 Tisi2 on Thickness and Linewidth In Submicron Cmos Structures
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- MRS Online Proceedings Library Archive / Volume 427 / 1996
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- 15 February 2011, 53
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- 1996
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Film Crystallographic Texture and Substrate Urface Roughness in Layered Aluminum Metallization
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- MRS Online Proceedings Library Archive / Volume 428 / 1996
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- 15 February 2011, 261
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- 1996
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Blanket and Local Crystallographic Texture Determination in Layered Al Metallization
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- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 617
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- 1995
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Local Texture and Electromigration in Fine Line Microelectronic Aluminum Metallization
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- MRS Online Proceedings Library Archive / Volume 343 / 1994
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- 15 February 2011, 653
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- 1994
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Line-Width Dependence of Stress in Passivated Al Lines During Thermal Cycling
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- MRS Online Proceedings Library Archive / Volume 338 / 1994
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- 22 February 2011, 261
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- 1994
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Electromigration Damage in Fine Al Alloy Lines due To Interfacial Diffusion
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- MRS Online Proceedings Library Archive / Volume 309 / 1993
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- 21 February 2011, 111
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- 1993
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Effects of Film Texture on Electromigration Lifetime Predictions
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- MRS Online Proceedings Library Archive / Volume 265 / 1992
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- 15 February 2011, 113
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- 1992
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Texture Effects on the Electromigration Behavior of Layered Ti/AlCu/Ti Films
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- MRS Online Proceedings Library Archive / Volume 265 / 1992
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- 15 February 2011, 107
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- 1992
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Electromigration Behavior in Layered Ti/AlCu/Ti Films and its Dependence on Intermetallic Structure
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- MRS Online Proceedings Library Archive / Volume 225 / 1991
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- 15 February 2011, 91
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- 1991
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Texture and Microstructure Effects on Electromigration Behavior of Aluminum Metallization
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- MRS Online Proceedings Library Archive / Volume 225 / 1991
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- 15 February 2011, 21
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- 1991
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