12 results
A Universal Thermal Module™ for Clusterable RTP and MOCVD Applications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 159
- Print publication:
- 1995
-
- Article
- Export citation
Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 87
- Print publication:
- 1995
-
- Article
- Export citation
Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 389 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 269
- Print publication:
- 1995
-
- Article
- Export citation
Rapid Thermal Processing Requirements for 0.35-µm IC Technologies and Beyond1
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 273
- Print publication:
- 1994
-
- Article
- Export citation
Demonstration of Multiprocessing by Silicon Epitaxy Following In-Situ Cleaning
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 273
- Print publication:
- 1991
-
- Article
- Export citation
Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 209
- Print publication:
- 1991
-
- Article
- Export citation
In-Situ Fabrication and Process Control Techniques in Rapid Thermal Processing†
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 143
- Print publication:
- 1991
-
- Article
- Export citation
Advanced epitaxial Si and GexSi1−x multiprocessing for semiconductor device technologies
-
- Journal:
- Journal of Materials Research / Volume 5 / Issue 6 / June 1990
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1159-1162
- Print publication:
- June 1990
-
- Article
- Export citation
Single Wafer Rapid Thermal Multiprocessing
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 3
- Print publication:
- 1989
-
- Article
- Export citation
Advanced Single-Wafer Sequential Multiprocessing Techniques for Semiconductor Device Fabrication
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 83
- Print publication:
- 1989
-
- Article
- Export citation
Microwave Plasma LPCVD of Tungsten in a Cold-Wall Lamp-Heated Rapid Thermal Processor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 295
- Print publication:
- 1987
-
- Article
- Export citation
Rapid Thermal/Plasma Processing for In-Situ Dielectric Engineering (Invited)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 73
- Print publication:
- 1987
-
- Article
- Export citation