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Advanced Single-Wafer Sequential Multiprocessing Techniques for Semiconductor Device Fabrication

  • Mehrdad M. Moslehi (a1) and Cecil Davis (a1)

Abstract

Single-Wafer Integrated in-situ Multiprocessing (SWIM) is recognized as the future trend for advanced microelectronics production in flexible fast turn-around computer-integrated semiconductor manufacturing environments. The SWIM equipment technology and processing methodology offer enhanced equipment utilization, improved process reproducibility and yield, and reduced chip manufacturing cost. They also provide significant capabilities for fabrication of new and improved device structures. This paper describes the SWIM techniques and presents a novel single-wafer advanced vacuum multiprocessing technology developed based on the use of multiple process energy/activation sources (lamp heating and remote microwave plasma) for multilayer epitaxial and polycrystalline semiconductor as well as dielectric film processing. Based on this technology, multilayer in-situ-doped homoepitaxial silicon and heteroepitaxial strained layer Si/GexSil-x/Si structures have been grown and characterized. The process control and the ultimate interfacial abruptness of the layer-to-layer transition widths in the device structures prepared by this technology will challenge the MBE techniques in multilayer epitaxial growth applications.

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[1] King, C., Hoyt, J., Gronet, C., Gibbons, J., Scott, M., and Turner, J., IEEE Electron Dev. Lett. EDL–10, 52 (1989).
[2] Moslehi, M. and Saraswat, K., IEEE Electron Dev. Lett. EDL–8, 421 (1987).

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