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In-Situ Fabrication and Process Control Techniques in Rapid Thermal Processing

  • Mehrdad M. Moslehi (a1), John Kuehne (a1), Richard Yeakley (a1), Lino Velo (a1), Habib Najm (a1), Bill Dostalik (a1), David Yin (a1) and Cecil J. Davis (a1)...

Abstract

Advanced rapid thermal processing (RTP) equipment and sensors have been developed for in-situ fabrication of semiconductor devices. High-performance multi-zone lamp modules have been applied to various processes including rapid thermal oxidation (RTO), chemicalvapor deposition (CVD) of tungsten and amorphous/polycrystalline silicon, silicide formation, as well as high-temperature rapid thermal annealing (RTA). Concurrent use of multizone lamps and multi-point temperature sensors allows real-time wafer temperature control and process uniformity optimization. Specific experimental results will be presented on the multi-zone lamp modules, in-situ process control sensors, and single-wafer fabrication processes.

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[1] Rapid Thermal and Related Processing Techniques, Singh, R. and Moslehi, M. M., Editors, Proc. SPIE 1393, (1991).
[2] Moslehi, M. M., IEEE Trans. on Semiconductor Mfg., 2, 130 (1989).
[3] Gyurcsik, R. S., Riley, T. J., and Sorrell, F. Y., IEEE Trans. on Semiconductor Mfg., 4 (1), 9 (1991).
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[5] Sorrel, F., SRC workshop on temperature meas., Santa Fe, New Mexico, Feb. (1990).
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[8] Gelpey, J. and Liao, J., SRC workshop on temperature meas., Santa Fe, New Mexico, Feb. (1990).
[9] Moslehi, M., Chapman, R., Wong, M., Paranjpe, A., Najm, H., Kuehne, J., Yeakley, R., and Davis, C., IEEE Trans. on Electron Devices (submitted for publication), (Dec. 1991).
[10] Kamins, T., Bradbury, D., Cass, T., Laderman, S., and Reid, G., J. Electrochem. Soc., 131, 2555 (1986).
[11] Moslehi, M. M., Shatas, S. C., Saraswat, K. C., and Meindl, J. D., IEEE Trans. on Electron Devices, ED-34 (6), 1407 (1987).

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In-Situ Fabrication and Process Control Techniques in Rapid Thermal Processing

  • Mehrdad M. Moslehi (a1), John Kuehne (a1), Richard Yeakley (a1), Lino Velo (a1), Habib Najm (a1), Bill Dostalik (a1), David Yin (a1) and Cecil J. Davis (a1)...

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