7 results
Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration
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- Journal:
- Microscopy and Microanalysis / Volume 23 / Issue S1 / July 2017
- Published online by Cambridge University Press:
- 04 August 2017, pp. 1462-1463
- Print publication:
- July 2017
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Dielectric Function and Band Gaps of Si1−xCx AND Si0.924−xGe0.076Cx (0≤x≤0.014) Semiconductor Alloys Grown on Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 379 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 211
- Print publication:
- 1995
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Stability And Precipitation Kinetics In Si1-yCy/Si and Si1-x-yGexC/Si Heterostructures Prepared by Solid Phase Epitaxy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 321 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 467
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- 1993
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The Formation of TiN-Encapsulated Cu Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 605
- Print publication:
- 1992
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Metastable Sic and SiGeC Alloys by Carbon Implantation and Solid Phase Epitaxy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 280 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 609
- Print publication:
- 1992
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Thermal Studies of Au-Ti Thin Films Deposited on Oxide Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 935
- Print publication:
- 1992
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HREM In-Situ Studies of Electron Irradiation Effects in Oxides
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- Journal:
- MRS Online Proceedings Library Archive / Volume 100 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 635
- Print publication:
- 1988
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