18 results
Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s02-05
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- 2011
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Polycrystalline Silicon-Germanium Electrode Contact Technology Improvement for MEMS Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1222 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1222-DD04-03
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- 2009
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Laser-Induced Crystallization of SiGe MEMS Structural Layers Deposited at Temperatures Below 250°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1153 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1153-A19-03
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- 2009
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Evaluation of the Electrical Properties, Piezoresistivity and Noise of poly-SiGe for MEMS-above-CMOS applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1153 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1153-A19-04
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- 2009
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The Road To Flexible Mems Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1075 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1075-J05-01
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- 2008
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A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1139 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG01-05
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- 2008
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Stacked Boron Doped Poly-Crystalline Silicon-Germanium Layers: an Excellent MEMS Structural Material
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1075 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1075-J05-02
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- 2008
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Low Thermal Budget Techniques For Controlling Stress In Si1-XGeX Deposited At 210°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 910 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0910-A21-14
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- 2006
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Metal induced crystallization of SiGe at 370°C for monolithically integrated MEMS applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 808 / 2004
- Published online by Cambridge University Press:
- 21 March 2011, A4.19
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- 2004
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Poly-SiGe, a superb material for MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 782 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A2.1
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- 2003
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Characterization of Reduced-pressure Chemical Vapor Deposition Polycrystalline Silicon Germanium Deposited at Temperatures ≤550 °C
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- Journal:
- Journal of Materials Research / Volume 17 / Issue 7 / July 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1580-1586
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- July 2002
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Sputtered Tantalum as a Structural Material for Surface Micromachined RF Switches
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- Journal:
- MRS Online Proceedings Library Archive / Volume 729 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, U3.3
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- 2002
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Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 °C
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 9 / September 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2607-2612
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- September 2001
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Effect of Deposition Conditions on the Structural and Mechanical Properties of Poly SiGe
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A8.5
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- 2000
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Comparison of the Electromigration Behavior of Al(MgCu) with Al(Cu) and Al(SiCu)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 133
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- 1998
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Elastic Constants and Viscosity of Amorphous PdSi/PdSiFe Multilayers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 239 / 1991
- Published online by Cambridge University Press:
- 22 February 2011, 121
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- 1991
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Determination of Elastic Constants and Viscosity of Amorphous Thin Films From Substrate Curvature
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- Journal:
- MRS Online Proceedings Library Archive / Volume 188 / 1990
- Published online by Cambridge University Press:
- 16 February 2011, 147
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- 1990
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Viscosity, Structural Relaxation and Defect Annihilation Kinetics of Amorphous Si
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- MRS Online Proceedings Library Archive / Volume 205 / 1990
- Published online by Cambridge University Press:
- 26 February 2011, 21
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- 1990
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