9 results
Interfacial Adhesion Study of Porous Low-K Dielectrics to CVD Barrier Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B12.12
- Print publication:
- 2002
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Positron Annihilation Lifetime Spectroscopy (Pals) Application in Metal Barrier Layer Integrity for Porous Low-K Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 686 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, A9.7
- Print publication:
- 2001
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Structure and Property Characterization of Porous Low-k Dielectric Constant Thin Films using X-ray Reflectivity and Small Angle Neutron Scattering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D4.1.1
- Print publication:
- 2000
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A Three-phase Model for the Structure of Porous Thin Films Determined by X-ray Reflectivity and Small-Angle Neutron Scattering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D5.22.1
- Print publication:
- 2000
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Evaluation of Copper Penetration in Low-κ Polymer Dielectrics by Bias-Temperature Stress
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 173
- Print publication:
- 1999
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Evaluation of Copper Penetration in Low-κ Polymer Dielectrics by Bias-Temperature Stress
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- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 535
- Print publication:
- 1999
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Electrical Reliability of Cu and Low-K Dielectric Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 317
- Print publication:
- 1998
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Electrical Extraction of The in-Plane Dielectric Constant of Fluorinated Polyimide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 476 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 129
- Print publication:
- 1997
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Preparation of Cross Sectional TEM Samples Using Lithographic Techniques and Reactive Ion Etching
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- Journal:
- MRS Online Proceedings Library Archive / Volume 199 / 1990
- Published online by Cambridge University Press:
- 16 February 2011, 43
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- 1990
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