Skip to main content Accessibility help
×
Home

A Three-phase Model for the Structure of Porous Thin Films Determined by X-ray Reflectivity and Small-Angle Neutron Scattering

  • Wen-li Wu (a1), Eric K. Lin (a1), Changming Jin (a2) and Jeffrey T. Wetzel (a2)

Abstract

A methodology to characterize nanoporous thin films based on a novel combination of high-resolution specular x-ray reflectivity and small-angle neutron scattering has been advanced to accommodate heterogeneities within the material surrounding nanoscale voids. More specifically, the average pore size, pore connectivity, film thickness, wall or matrix density, coefficient of thermal expansion, and moisture uptake of nanoporous thin films with non-homogeneous solid matrices can be measured. The measurements can be performed directly on films up to 1.5 µm thick while supported on silicon substrates. This method has been successfully applied to a wide range of industrially developed materials for use as low-k interlayer dielectrics.

Copyright

References

Hide All
1. Hrubesh, L. W., Keene, L. E., and Latorre, V. R., J. Mater. Res. 8, 1736 (1993).10.1557/JMR.1993.1736
2. Grasserbauer, M. and Werner, H. W., Analysis of microelectronic materials and devices (Wiley, New York, 1991).
3. Gidley, D. W., Frieze, W. E., Dull, T. L., Yee, A. F., Nguyen, C. V. and Yoon, D. Y., Appl. Phys. Lett., 76 (10), 1282 (2000).10.1063/1.126009
4. Dultsev, F. N. and Baklanov, M. H., Elec. Solid State Lett., 2, 192 (1999).10.1149/1.1390780
5. Wu, W. L., Wallace, W. E., Lin, E. K., Lynn, G. W., Glinka, C. J., Ryan, E. T. and Ho, H. M., J. Appl. Phys., 87, 1193 (2000).10.1063/1.371997
6. Lekner, J., Theory of Reflection (Nijhoff, Dordrecht, 1987).
7. Dietrich, S. and Haase, A., Phys. Rep. 260, 1 (1995).10.1016/0370-1573(95)00006-3
8. Chason, E. and Mayer, T. M., Crit. Rev. Solid State Mat. Sci. 22, 1 (1997).10.1080/10408439708241258
9. Higgins, J. S. and Benoit, H. C., Polymers and Neutron Scattering (Oxford University Press, Oxford, 1994).
10. Wu, W. L., Polymer, 23, 1907 (1982).10.1016/0032-3861(82)90216-6
11. Debye, P., Anderson, H. R., and Brumberger, H., J. Appl. Phys. 28, 679 (1957).10.1063/1.1722830

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed