Research Article
Overview Of Process Integration Issues For Low K Dielectrics
- Published online by Cambridge University Press: 10 February 2011, 3
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Fundamental Aspects Of Polymer Metallization
- Published online by Cambridge University Press: 10 February 2011, 15
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Liquid-Phase Deposition of Low-K Organic Silicon-Oxide Films
- Published online by Cambridge University Press: 10 February 2011, 27
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Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses
- Published online by Cambridge University Press: 10 February 2011, 33
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Experimental and Theoretical Study of Structure-Dielectric Property Relationships for Polysilsesquioxanes
- Published online by Cambridge University Press: 10 February 2011, 39
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Electron Beam Processing for Spin-on Polymers and its Applications to Back-End-of-Line (BEOL) Integration
- Published online by Cambridge University Press: 10 February 2011, 49
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Newly Developed Low-K and Low-Stress Fluorinated Silicon Oxide Utilizing Temperature-Difference Liquid-Phase Deposition Technology
- Published online by Cambridge University Press: 10 February 2011, 57
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Low-Dielectric Constant SiO(F,C) Films for ULSI Interconnections Prepared by CF4 Plasma Ion Implantation
- Published online by Cambridge University Press: 10 February 2011, 63
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Templating Nanopores Into Poly(MethylSilsesquioxane): New Lowdielectric Coatings Suitable for MicroElectronic Applications
- Published online by Cambridge University Press: 10 February 2011, 69
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Pulsed Plasma Enhanced Chemical Vapor Deposition from CH2F2, C2H2F4, and CHCIF2
- Published online by Cambridge University Press: 10 February 2011, 75
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Phase Separation Behaviors Of Polyimide Blends
- Published online by Cambridge University Press: 10 February 2011, 87
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Pulsed Plasma Synthesis of Low Dielectric Constant Materials
- Published online by Cambridge University Press: 10 February 2011, 93
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Fabrication and Characterization of Spin-On Silica Xerogel Films
- Published online by Cambridge University Press: 10 February 2011, 99
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Nanoporous Silica For Low K Dielectrics
- Published online by Cambridge University Press: 10 February 2011, 105
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Porous Silica: A Potential Material for Low Dielectric Constant Applications
- Published online by Cambridge University Press: 10 February 2011, 111
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Dielectric Properties of Glass Capillary Arrays
- Published online by Cambridge University Press: 10 February 2011, 117
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Ion Beam Techniques for Low K Materials Characterization
- Published online by Cambridge University Press: 10 February 2011, 125
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Adhesion Energy Measurements of Multilayer Low-K Dielectric Materials for ULSI Applications
- Published online by Cambridge University Press: 10 February 2011, 133
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Optical Birefringence to Determine Morphological Changes in Low-K Thin Film CVD Polymers
- Published online by Cambridge University Press: 10 February 2011, 139
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Dielectric Anisotropy of Organic Interlayer Dielectrics Confined in Submicron
- Published online by Cambridge University Press: 10 February 2011, 145
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