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Characterization and Integration in Cu Damascene Structures of AURORA, an Inorganic Low-k Dielectric
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- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D5.14.1
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- 2000
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Microstructural studies by transmission electron microscopy of the formation of ultrathin PtSi layers with novel silicidation processes
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 6 / June 1999
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2577-2587
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- June 1999
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Influence of SiGe Thickness on the Co/SiGe/Si Solid State Reaction
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- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 151
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- 1999
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A Beem Study of PtSi Schottky Contacts on Ion-Milled Si
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- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 201
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- 1999
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The Influence of Ti Capping Layers on CoSi2 Formation in the Presence of Interfacial Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 139
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- 1999
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Electron Microscopic Studies of Co- and Ti-Germanosilicide Films Formed on SiGe Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 523 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 133
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- 1998
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New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 307
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- 1998
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Structural and Electrical Characterization of FeSix – Layers (1≤ X ≤2) Prepared by RTP of Fe Layers Sputtered on Si (100)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 389
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- 1995
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Characterization of Ultra-Thin PtSi Films for Infrared Detectors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 402 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 449
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- 1995
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Titanium Silicidation and Secondary Defect Annihilation in ION Beam Processed Sige Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 402 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 149
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- 1995
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