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The properties of nanocomposite tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin films depend closely on reactive magnetron sputtering deposition process conditions. The chemical composition and structure trends for TaC/a-C:H films were obtained as a function of three deposition parameters: acetylene flow rate, applied direct current (dc) bias voltage, and substrate carousel rotation rate. Films were deposited according to a 23 factorial experimental design to enable multiple linear regression modeling of property trends. The Ta/C atomic ratio, hydrogen content, total film thickness, TaC crystallite size, and Raman spectra were statistically dependent on acetylene flow rate, applied dc bias voltage, or both. Transmission electron microscopy revealed a nanometer-scale lamellar film structure, the periodicity of which was affected mostly by substrate carousel rotation rate. The empirical property trends were interpreted with respect to hypothesized growth mechanisms that incorporate elements of physical vapor deposition and plasma-enhanced chemical vapor deposition.
CVD diamond films, ET 100 of Norton Diamond Film, were treateds in ultrahigh purity O2 from 420 to 575°C at 95 kPa. Auger and x-ray photoelectron spectra were collected from CVD and natural diamond surfaces. The Auger KVV line shapes of the CVD diamond with various surface conditions were compared to those of natural diamonds and sp2-bound graphite (HOPG) and glassy carbon. Comparisons were made on the peak shape of A1, which is the major satellite peak of carbon KVV. Auger KVV line shaped of oxidized CVD diamonds were more similar to that of natural diamond than either HOPG or glassy carbon. XPS is more sensitive to the change of surface chemisorbed species. The C Is binding energy of oxygenated and oxidized CVD diamonds (287.3 eV) was higher than that of natural diamond (285.7 eV), graphite (283.0 eV) and glassy carbon (284.2 eV). Auger and XPS findings indicated that when treated in O2 from 420 to 575°C at 95 kPa, direct oxidation of CVD diamond occurred without graphitization
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