10 results
Inductively Coupled High-Density Plasma-Induced Etch Damage of GaN MESFETs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 622 / 2000
- Published online by Cambridge University Press:
- 15 March 2011, T7.5.1
- Print publication:
- 2000
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Fabrication and Characterization of GaN Junctionfield Effect Transistors
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 5 / Issue S1 / 2000
- Published online by Cambridge University Press:
- 13 June 2014, pp. 376-383
- Print publication:
- 2000
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High-Density Plasma-Induced Etch Damage of GaN
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- Journal:
- MRS Online Proceedings Library Archive / Volume 573 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 271
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- 1999
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Group-III Nitride ETCH Selectivity IN BCl /Cl ICP Plasmas
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 4 / Issue S1 / 1999
- Published online by Cambridge University Press:
- 13 June 2014, pp. 823-833
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- 1999
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Fabrication and Characterization of GaN Junctionfield Effect Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 595 / 1999
- Published online by Cambridge University Press:
- 03 September 2012, F99W4.9
- Print publication:
- 1999
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GaN Etching in BCl3/Cl2 Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 512 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 487
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- 1998
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Group-III Nitride Etch Selectivity in BCl3/Cl2 ICP Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 537 / 1998
- Published online by Cambridge University Press:
- 15 February 2011, G8.1
- Print publication:
- 1998
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In-Situ Monitoring Of Etch By-Products During Reactive Ion Beam Etching Of Gaas In Chlorine/Argon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 483 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 191
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- 1997
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Selective Etching Of Wide Bandgap Nitrides
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- Journal:
- MRS Online Proceedings Library Archive / Volume 483 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 155
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- 1997
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Comparison Of Dry-Etch Techniques For Gan, Inn, And Ain
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- Journal:
- MRS Online Proceedings Library Archive / Volume 483 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 103
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- 1997
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