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Electron Holography of CMOS Devices with Epitaxial Layers
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
- Published online by Cambridge University Press:
- 27 August 2014, pp. 252-253
- Print publication:
- August 2014
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Three Dimensional Compositional Characterization of Dielectric Films with LEAP Tomography
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- Journal:
- Microscopy and Microanalysis / Volume 13 / Issue S02 / August 2007
- Published online by Cambridge University Press:
- 05 August 2007, pp. 828-829
- Print publication:
- August 2007
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TiSi2 Formation on Submicron Polysilicon Lines: Role of Line Width and Dopant Concentration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 109
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- 1993
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