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Three Dimensional Compositional Characterization of Dielectric Films with LEAP Tomography

Published online by Cambridge University Press:  05 August 2007

R Ulfig ,
K Thompson ,
R Alvis ,
DJ Larson  and
P Ronsheim
R Ulfig
Affiliation:
Imago Scientific Instruments Corporation
K Thompson
Affiliation:
Imago Scientific Instruments Corporation
R Alvis
Affiliation:
Imago Scientific Instruments Corporation
DJ Larson
Affiliation:
Imago Scientific Instruments Corporation
P Ronsheim
Affiliation:
IBM Corporation East Fishkill
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 828 - 829
Copyright
© 2007 Microscopy Society of America

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