13 results
Materials and scaling effects on on-chip interconnect reliability
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1559 / 2013
- Published online by Cambridge University Press:
- 18 July 2013, mrss13-1559-aa07-01
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- 2013
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Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B03-15
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- 2007
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Electromigration Reliability in Nanoscale Cu Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1036 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1036-M05-02
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- 2007
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Application of Nanoindentation to Characterize Fracture in ILD Films Used in the BEOL.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B8.18
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- 2005
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Modified Edge Lift-Off Test: Experimental Modifications for Multifilm Systems
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- Journal:
- MRS Online Proceedings Library Archive / Volume 594 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 365
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- 1999
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Porous Organosilicates for On-Chip Dielectric Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 3
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- 1999
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Characterization of Spin -on Glasses by Microindentation.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 157
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- 1998
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Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 33
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- 1998
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Thermal and Electromigration Strain Distributions in 10 μm-Wide Aluminum Conductor Lines Measured by X-Ray Microdiffraction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 473 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 273
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- 1997
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Local and Global Stress Distributions in BEOL Metallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 428 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 565
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- 1996
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X-Ray Microdiffraction for VLSI
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- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 35
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- 1996
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Toughened, Inorganic-Organic Hybrid Materials for Microelectronic Application
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- Journal:
- MRS Online Proceedings Library Archive / Volume 443 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 47
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- 1996
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Grain Orientation Mapping and Spatially Resolved Strain Measurements for Polycrystalline Films by X-Ray Microdiffraction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 213
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- 1995
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