In recent years, many microrobots have been developed for search applications using swarms in places where humans cannot enter, such as disaster sites. Hexapod robots are suitable for moving over uneven terrain. In order to use micro-hexapod robots for swarm exploration, it is necessary to reduce the robot’s size while maintaining its rigidity. Herein, we propose a micro-hexapod with an SU-8 rigid frame that can be assembled from a single sheet. By applying the SU-8 coating as a structure to the hexapod and increasing the rigidity, the substrate size can be reduced to within 40 mm × 40 mm and the total length when assembled to approximately 30 mm. This enables the integration of the micro electromechanical systems (MEMS) process into small and inexpensive hexapod robots. In this study, we assembled the hexapod with a rigid frame from a sheet created using the MEMS process and evaluated the leg motion.

This article introduces the 2D multilayer Laue lens (MLL) nanofocusing optics recently developed for high-resolution hard X-ray microscopy. The new optics utilized a micro-electro-mechanical-system (MEMS)-based template to accommodate two linear MLL optics in a pre-aligned configuration. Angular misalignment between the two lenses was controlled in tens of millidegrees, and the lateral position error was on a micrometer scale. Using the developed 2D MLLs, an astigmatism-free point focus of approximately 14 nm by 13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy was obtained. The success of 2D MLL optics with an approaching 10 nm resolution is a significant step forward for the development of high-resolution hard X-ray microscopy and applications of MLL optics in the hard X-ray community.

A high-frequency short-pulsed stroboscopic micro-visual system was employed to capture the transient image sequences of a periodically in-plane working micro-electro-mechanical system (MEMS) devices. To demodulate the motion parameters of the devices from the images, we developed the feature point matching (FPM) algorithm based on Speeded-Up Robust Features (SURF). A MEMS gyroscope, vibrating at a frequency of 8.189 kHz, was used as a testing sample to evaluate the performance of the proposed algorithm. Within the same processing time, the SURF-based FPM method demodulated the velocity of the in-plane motion with a precision of 10−5 pixels of the image, which was two orders of magnitude higher than the template-matching and frame-difference algorithms.

This article presents the main aspects of the design solutions (based on the application of sensors MEMS and cantilevers), testing and applying of the multi-functional borehole logger ANTTIC (Antarctic Thermo-barometer, Inclinometer, Caliper) for geophysical high-precision monitoring (when simultaneous registering of temperature, pressure, axis inclination angle and radii of borehole cross-sections at 12 points), which is designed specifically for ultra-low temperatures and ultra-high pressures, and to determine an elliptical borehole shape and registration anisotropy factor in deep ice boreholes in the central region of Eastern Antarctica, in the areas of dome A at the Kunlun station (China) and/or of lake Vostok at the Vostok station (Russia).

One of the biggest challenges for in situ heating transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) is the ability to measure the local temperature of the specimen accurately. Despite technological improvements in the construction of TEM/STEM heating holders, the problem of being able to measure the real sample temperature is still the subject of considerable discussion. In this study, we review the present literature on methodologies for temperature calibration. We analyze calibration methods that require the use of a thermometric material in addition to the specimen under study, as well as methods that can be performed directly on the specimen of interest without the need for a previous calibration. Finally, an overview of the most important characteristics of all the treated techniques, including temperature ranges and uncertainties, is provided in order to provide an accessory database to consult before an in situ TEM/STEM temperature calibration experiment.

The design of a novel MEMS (Micro-Electro-Mechanical System) sensor-based monitoring system is presented in this article for the in situ monitoring of the conditions (temperature, relative humidity) of an engineered bentonite barrier for the underground disposal of radioactive waste in a geological disposal facility (GDF). A first prototype of the monitoring system incorporating multiple state-of-the-art MEMS sensors has been developed on a PCB-based (Printed Circuit Board) structure, in order to measure the variation of temperature and relative humidity inside a cylindrical bentonite block during the hydration process. The monitoring system comprises separate sensor boards, the microcontroller-equipped interface board and the software user interface in the Labview environment. One of the main design priorities is to reduce the size of the embedded sensors in order to minimize their influence on the hydro-mechanical response of the bentonite block. The sensor boards are encapsulated in different manners to protect them from moisture, chemical corrosion and mechanical shocks. The sensor system has been tested and calibrated in the temperature range between –20°C and 120°C, and at different relative humidity levels implemented by saturated salt solutions in enclosed containers. Test results demonstrate that the sensors have shown good functionality and robustness in harsh test environments such as high temperature and high humidity. Both temperature and relative humidity sensors have shown satisfactory precision level and temporal stability, which are in good accordance with the design specification of these devices.

In a waist-worn Pedestrian Navigation System (PNS) based on Dead-Reckoning (DR), heading drift caused by Micro-Electro-Mechanical System (MEMS) gyro bias is an essential factor affecting DR accuracy. Considering the characteristics of pedestrian navigation and the poor bias repeatability of MEMS gyros, this paper presents a standing calibration method for MEMS gyro bias. The current gyro biases for each boot can be calibrated accurately in the initial stage before walking. Since the attitude angles calculated by the output data from magnetic sensor and accelerometers do not drift, this paper applies the reverse algorithm of attitude updating to calculate the angular velocities of human motion. Then the gyro biases at each moment can be acquired by subtraction operation between the measured angular velocities from gyros and the calculated angular velocities of human motion. Finally, in order to restrain the random error caused by sensor noise, the calculated biases in the initial stage are smoothed, and consequently the optimal estimate of current gyro biases after each boot can be obtained. Still and dynamic turntable experiments and a walking experiment are performed to compare and analyse the proposed method and the Zero Angular Rate Update (ZARU) method. Experimental results show that the proposed method can also calibrate the gyro bias accurately in the case of body swaying.

The physics underlying operation of cold (room-temperature) ionic-liquid emitter sources for use in propulsion shows that such thrusters are advantaged relative to all other “rockets” because of the direct scaling of power with emitter array density. Nanomaterials and their integration through nano- and microfabrication can propel these charged-particle sources to the forefront and open up new applications including mass-efficient in-orbit satellite propulsion and high-thrust-density deep-space exploration. Analyses of electrostatic, fluid-dynamic, and electrochemical limits all suggest that arrays of such ionic-liquid thrusters can reach thrust densities beyond most in-space propulsion concepts, with a limit on nanoporous thruster packing density of ∼1 μm due to ionic-liquid viscous flow and electrochemistry. Nanoengineered materials and manufacturing schemes are suggested for the implementation of microfabricated and nanostructured thruster arrays.

The existence and multiplicity of solutions to a quasilinear, elliptic partial differential equation with singular non-linearity is analysed. The partial differential equation is a recently derived variant of a canonical model used in the modelling of micro-electromechanical systems. It is observed that the bifurcation curve of solutions terminates at single dead-end point, beyond which no classical solutions exist. A necessary condition for the existence of solutions is developed, revealing that this dead-end point corresponds to a blow-up in the solution's gradient at a point internal to the domain. By employing a novel asymptotic analysis in terms of two small parameters, an accurate characterization of this dead-end point is obtained. An arc length parameterization of the solution curve can be employed to continue solutions beyond the dead-end point; however, all extra solutions are found to be multi-valued. This analysis therefore suggests that the dead-end is a bifurcation point associated with the onset of multi-valued solutions for the system.

In prior research, specimen holders that employ a novel MEMS-based heating technology (AduroTM) provided by Protochips Inc. (Raleigh, NC, USA) have been shown to permit sub-Ångström imaging at elevated temperatures up to 1,000°C during in situ heating experiments in modern aberration-corrected electron microscopes. The Aduro heating devices permit precise control of temperature and have the unique feature of providing both heating and cooling rates of 106°C/s. In the present work, we describe the recent development of a new specimen holder that incorporates the Aduro heating device into a “closed-cell” configuration, designed to function within the narrow (2 mm) objective lens pole piece gap of an aberration-corrected JEOL 2200FS STEM/TEM, and capable of exposing specimens to gases at pressures up to 1 atm. We show the early results of tests of this specimen holder demonstrating imaging at elevated temperatures and at pressures up to a full atmosphere, while retaining the atomic resolution performance of the microscope in high-angle annular dark-field and bright-field imaging modes.

A hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally-efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.

Millimeter-wave phase shifters are important components for a wide scope of applications. An analog-type phase shifter for W-band has been designed, analyzed, fabricated, and measured. The phase shifter consists of a reconfigurable high-impedance surface (HIS) controlled by micro-electromechanical system (MEMS) varactors and placed adjacent to a silicon dielectric rod waveguide. The analog-type phase shift in the range of 0–32° is observed at 75 GHz whereas applying bias voltage from 0 to 40 V to the MEMS varactors. The insertion loss of the MEMS tunable HIS is between 1.7 and 5 dB, depending on the frequency.

In environments where GNSS is unavailable or not useful for positioning, the use of low cost MEMS-based inertial sensors has paved a way to a more cost effective solution. Of particular interest is a foot mounted pedestrian navigation system, where zero velocity updates (ZUPT) are used with the standard strapdown navigation algorithm in a Kalman filter to restrict the error growth of the low cost inertial sensors. However heading drift still remains despite using ZUPT measurements since the heading error is unobservable. External sensors such as magnetometers are normally used to mitigate this problem, but the reliability of such an approach is questionable because of the existence of magnetic disturbances that are often very difficult to predict. Hence there is a need to eliminate the heading drift problem for such a low cost system without relying on external sensors to give a possible stand-alone low cost inertial navigation system. In this paper, a novel and effective algorithm for generating heading measurements from basic knowledge of the orientation of the building in which the pedestrian is walking is proposed to overcome this problem. The effectiveness of this approach is demonstrated through three field trials using only a forward Kalman filter that can work in real-time without any external sensors. This resulted in position accuracy better than 5 m during a 40 minutes walk, about 0·1% in position error of the total distance. Due to its simplistic algorithm, this simple yet very effective solution is appealing for a promising future autonomous low cost inertial navigation system.

The poly (vinylidene difluoride) (PVDF) has been of great interest for energy conversion of microelectromechanical system devices. A semicrystalline polymer, the PVDF has five crystallographic forms, α, β, γ, δ, and ε. The latter four structures exhibit a permanent dipole moment. In this research, we investigated effects of microstructures of the PVDF on its piezoelectricity for energy harvesting. Using various experimental techniques, we observed the power density generated by a mechanical force that was correlated with the phase transformation between amorphous, α, β, and γ phases. The transformation was time-dependent in a nonlinear manner. Such transformation influences the energy transition and storage of small devices.

This paper aims at the formulation of a computational model for the simulation of adhesion phenomena in micro-electro-mechanical systems (MEMS) under various environmental conditions. The present approach is based on finite-element (FE) simulations of a representative part of the surface. The micro-scale analyses include the contact behaviour of the asperities and different “proximity interactions” like Van der Waals and capillary forces. The model is first validated in the simple case of a sphere over a flat surface and then applied to a realistic surface sample.

In the integration of Global Positioning System (GPS) and Inertial Navigation System (INS), the commonly used Kalman filter provides satisfactory results if both sources of information are continuously available. However, GPS outages provoke a fast degradation of precision, especially in low dynamic trajectories such as a mobile platform device held by a human operator. To deal with this problem we propose a data-filtering scheme to apply to INS raw data prior to the integration with GPS. The proposed technique proves to be very valuable for mitigating the high short-term instability of raw INS data during the walking movement and is also capable of eliminating the induced undesirable human operator vibrations. Final imposed corrections adapted to the particular dynamical response of the INS sensor provide comparably accurate results and often better than those achieved in similar works with the use of the Kalman filter.

This paper investigates the effect of spontaneous polarization of magnetron-sputtered aluminum nitride on the electrical properties and reliability of Radio Frequency – Micro-Electro-Mechanical Systems capacitive switches. The assessment is performed with the aid of application of thermally stimulated polarization currents in metal-insulator-metal capacitors and temperature dependence of device capacitance. The study reveals the presence of a surface charge, which is smaller than that expected from material spontaneous polarization, but definitely is responsible for the low degradation rate under certain bias polarization life tests.

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

Thanks to its physical characteristics, Ultra-wideband (UWB) is one of the most promising technologies for indoor pedestrian navigation. UWB radio localisation systems however experience multipath phenomena that decrease the precision and the reliability of the user's location. To cope with complex indoor environments, UWB radio signals are coupled with inertial measurements from Micro Electro Mechanical Sensors (MEMS) in an extended Kalman filter. Improved performances of the filter are presented and compared with reference trajectories and with pure inertial solutions. Only specific selection methods enable this improvement by detecting and removing outliers in the raw localisation data.

Navigation involves the integration of methodologies and systems for estimating the time varying position and attitude of moving objects. Inertial Navigation Systems (INS) and the Global Positioning System (GPS) are among the most widely used navigation systems. The use of cost effective MEMS based inertial sensors has made GPS/INS integrated navigation systems more affordable. However MEMS sensors suffer from various errors that have to be calibrated and compensated to get acceptable navigation results. Moreover the performance characteristics of these sensors are highly dependent on the environmental conditions such as temperature variations. Hence there is a need for the development of accurate, reliable and efficient thermal models to reduce the effect of these errors that can potentially degrade the system performance. In this paper, the Allan variance method is used to characterize the noise in the MEMS sensors. A six-position calibration method is applied to estimate the deterministic sensor errors such as bias, scale factor, and non-orthogonality. An efficient thermal variation model is proposed and the effectiveness of the proposed calibration methods is investigated through a kinematic van test using integrated GPS and MEMS-based inertial measurement unit (IMU).