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Analog-type millimeter-wave phase shifters based on MEMS tunable high-impedance surface and dielectric rod waveguide

Published online by Cambridge University Press:  06 October 2011

Dmitry Chicherin ,
Mikael Sterner ,
Dmitri Lioubtchenko ,
Joachim Oberhammer  and
Antti V. Räisänen
Dmitry Chicherin*
Affiliation:
Department of Radio Science and Engineering/SMARAD, Aalto University School of Electrical Engineering, P.O. Box 13000, FI-00076 AALTO, Finland. Phone: +358 50 3667637
Mikael Sterner
Affiliation:
Microsystem Technology Lab, KTH – Royal Institute of Technology, 10044 Stockholm, Sweden
Dmitri Lioubtchenko
Affiliation:
Department of Radio Science and Engineering/SMARAD, Aalto University School of Electrical Engineering, P.O. Box 13000, FI-00076 AALTO, Finland. Phone: +358 50 3667637
Joachim Oberhammer
Affiliation:
Microsystem Technology Lab, KTH – Royal Institute of Technology, 10044 Stockholm, Sweden
Antti V. Räisänen
Affiliation:
Department of Radio Science and Engineering/SMARAD, Aalto University School of Electrical Engineering, P.O. Box 13000, FI-00076 AALTO, Finland. Phone: +358 50 3667637
*
Corresponding author: D. Chicherin Email: dmitry.chicherin@aalto.fi
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Abstract

Millimeter-wave phase shifters are important components for a wide scope of applications. An analog-type phase shifter for W-band has been designed, analyzed, fabricated, and measured. The phase shifter consists of a reconfigurable high-impedance surface (HIS) controlled by micro-electromechanical system (MEMS) varactors and placed adjacent to a silicon dielectric rod waveguide. The analog-type phase shift in the range of 0–32° is observed at 75 GHz whereas applying bias voltage from 0 to 40 V to the MEMS varactors. The insertion loss of the MEMS tunable HIS is between 1.7 and 5 dB, depending on the frequency.

Keywords

Phase shifterMEMSmillimeter waveshigh-impedance surfacedielectric rod waveguide
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 3 , Special Issue 5: RF MEMS , October 2011 , pp. 533 - 538
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2011

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