We have grown epitaxial rare earth niobate (RE3NbO7; RE – La, Ce, Nd, Sm, Eu, Gd, Ho, Y, and Yb) buffer layers on biaxially textured Ni-W substrates using chemical solution deposition approach. Precursor solutions of 0.4 M total cation concentration were spin coated on short samples of Ni-3 at.%W (Ni-W) substrates and heat-treated at 1050 to 1100°C in a gas mixture of Ar-4%H2 for 15 minutes. Effect of solution chemistry and processing atmosphere on texture and microstructure were studied. Detailed X-Ray studies indicated that all the rare earth niobates were grown epitaxially. There was no significant change observed in texture for different precursor chemistry, however, dramatic effect on surface morphology observed. SEM and AFM investigations of RE3NbO7 films reveal noticeable difference in surface morphology and roughness for various processing atmospheres. Processing under a 20% wet Ar-4% H2 gas mixture was found to be the optimum condition for growing Gd3NbO7 films with high quality microstructure.