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The Initial Stages of Plasma Synthesis of Diamond Films*

  • R. Meilunas (a1), M.S. Wong (a1), K. Sheng (a1), T.P. Ong (a1) and R.P.H. Chang (a1)...

Abstract

The effects of plasma starting conditions on the initial stages of diamond nucleation and growth in a microwave plasma have been studied as a function of important deposition parameters. The influence of the substrate temperature on the diamond nucleation rate, quality, and final film morphology has been elucidated through various analytical measurements. The diamond films are characterized with Raman spectroscopy, X-ray diffraction, and scanning electron microscopy. Finally, methods are described for reproducibly controlling the grain size and morphology of the diamond films for tribological and abrasive applications.

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This research is sponsored by DOE Basic Energy Science Division.

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The Initial Stages of Plasma Synthesis of Diamond Films*

  • R. Meilunas (a1), M.S. Wong (a1), K. Sheng (a1), T.P. Ong (a1) and R.P.H. Chang (a1)...

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