Thin film LiCoO2 anodes and SnO2 cathodes on the order of 1-10 µtm thick have been synthesized using a spray decomposition technique, employing a lithium-nickel nitrate/methanol solution and tin ethylhexanoate/methanol solution, respectively. Preliminary electrochemical test results on the films indicate that the LiCoO2 anodes in general display a relatively high open circuit voltage (OCV) of ∼4.10-4.25V, good specific capacity on the order of 120 mAh/g, and acceptable cycle-ability, with a 16-25% decay in operating voltage after 50 cycles. The SnO2 films display excellent performance characteristics, upon an expected initial drop in capacity, with an OCV of 1.00-1.10V, specific capacity of ∼600 mAh/g, and virtually no decay in operating voltage after 50 cycles. The solid-state electrolyte, lithium phosphate, was prepared in thin film form by a similar spray processing technique. Additionally, it has been demonstrated that spray decomposition can be used to sequentially deposit the anode, electrolyte, and cathode film layers to form a layered thin film battery (TFB), although electrochemical testing of this thin film device has not yet been conducted.