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Deposition Chemistry and Structure of Amorphous Fluorinated Silicon Nitride
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- Journal:
- MRS Online Proceedings Library Archive / Volume 118 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 67
- Print publication:
- 1988
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- Article
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A 29Si-NMR Investigation of Amorphous Hydrogenated Silicon Nitride
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- Journal:
- MRS Online Proceedings Library Archive / Volume 70 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 337
- Print publication:
- 1986
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- Article
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