11 results
Impact of Post Deposition Annealing on Characteristics of HfxZr1-xO2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1155 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1155-C07-05
- Print publication:
- 2009
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Scaling of Hafnium-based High-k Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 996 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0996-H03-01
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- 2007
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Theoretical and Experimental Investigation of Thermal Stability of HfO2/Si and HfO2/SiO2 Interfaces
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- Journal:
- MRS Online Proceedings Library Archive / Volume 731 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, W5.2
- Print publication:
- 2002
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Thermodynamic Stability of High-K Dielectric Metal Oxides ZrO2 and HfO2 in Contact with Si and SiO2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B3.2
- Print publication:
- 2002
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Chemical Vapor Deposition of Titania/Silica and Zirconia Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K4.1
- Print publication:
- 2001
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Single Wafer Amorphous Silicon Process Evaluation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 467 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 633
- Print publication:
- 1997
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Morphology and Step Coverage of In-Situ Doped Polysilicon Films Deposited by Single Wafer CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 89
- Print publication:
- 1994
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Microstructure and Integrity of Thin Silicon Films on Sio2 after Immersion in 10:1 Buffered HF
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- Journal:
- MRS Online Proceedings Library Archive / Volume 297 / 1993
- Published online by Cambridge University Press:
- 01 January 1993, 1037
- Print publication:
- 1993
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Growth and Surface Morphology of Thin Silicon Films Using an Atomic Force Microscope
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- Journal:
- MRS Online Proceedings Library Archive / Volume 280 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 103
- Print publication:
- 1992
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Growth and Surface Morphology of Thin Silicon Films Using an atomic Force Microscope
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- Journal:
- MRS Online Proceedings Library Archive / Volume 295 / 1992
- Published online by Cambridge University Press:
- 15 February 2011, 65
- Print publication:
- 1992
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Thin Film Properties of LPCVD TiN Barrier for Silicon Device Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 250 / 1991
- Published online by Cambridge University Press:
- 15 February 2011, 199
- Print publication:
- 1991
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