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Surface Conditioning Issues Related to Patiterning and Etching
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 55
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- 1992
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Defect-Formation Dependence on Group V-Dopant Atoms in Electron-Irradiated Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 163 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 283
- Print publication:
- 1989
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Optically Detected Magnetic Resonance of a Hydrogen-Related Complex Defect in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 163 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 377
- Print publication:
- 1989
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- Article
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