2 results
Nano-scale Characterization of Surface Defects on CMP-finished Si Wafers by Scanning Probe Microscopy Combined with Laser Light Scattering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C08-02
- Print publication:
- 2007
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- Article
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In Situ Control of Native Oxide Growth for Semiconductor Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 19
- Print publication:
- 1992
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- Article
- Export citation