12 results
Temperature Estimation and Precision Control of RTP Systems by Multi-Zone Lamp Interference and Wafer Emissivity Compensation I: Model Identification
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 91
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- 1997
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A Universal Thermal Module™ for Clusterable RTP and MOCVD Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 159
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- 1995
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The Insertion of Single-Wafer Integrated Thermal/CVD Technology in Front-End and Back-End of the Line Processing; Lessons Learned
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 229
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- 1994
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Rapid Thermal Processing Requirements for 0.35-µm IC Technologies and Beyond1
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 273
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- 1994
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Demonstration of Multiprocessing by Silicon Epitaxy Following In-Situ Cleaning
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 273
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- 1991
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Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 209
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- 1991
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In-Situ Fabrication and Process Control Techniques in Rapid Thermal Processing†
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 143
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- 1991
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Advanced epitaxial Si and GexSi1−x multiprocessing for semiconductor device technologies
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- Journal:
- Journal of Materials Research / Volume 5 / Issue 6 / June 1990
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1159-1162
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- June 1990
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Single Wafer Rapid Thermal Multiprocessing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 3
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- 1989
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Advanced Single-Wafer Sequential Multiprocessing Techniques for Semiconductor Device Fabrication
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 83
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- 1989
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Microwave Plasma LPCVD of Tungsten in a Cold-Wall Lamp-Heated Rapid Thermal Processor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 295
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- 1987
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Rapid Thermal/Plasma Processing for In-Situ Dielectric Engineering (Invited)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 73
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- 1987
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