7 results
Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor*
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- Journal:
- The European Physical Journal - Applied Physics / Volume 28 / Issue 3 / December 2004
- Published online by Cambridge University Press:
- 23 November 2004, pp. 343-346
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- December 2004
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High density plasma enhanced chemical vapor deposition of optical thin films
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- Journal:
- The European Physical Journal - Applied Physics / Volume 26 / Issue 1 / April 2004
- Published online by Cambridge University Press:
- 04 March 2004, pp. 3-9
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- April 2004
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Analysis of Vibrational Properties of Thin Films Using in-Situ Infrared Ellipsometry: Applications to Polymerlike Amorphous Carbon Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 544 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 71
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- 1998
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Electronic Properties and Device Applications of Hot-Wire CVD Polycrystalline Silicon Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 467 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 271
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- 1997
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Hot-Wire Hydrogen Passivation of Polycrystalline Silicon TFT's
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- Journal:
- MRS Online Proceedings Library Archive / Volume 471 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 143
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- 1997
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Photoconductive Polycrystalline Silicon Films on Glass Obtained by Hot-Wire CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 420 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 289
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- 1996
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Direct Writing of Al on Si by UV Exposure Prior to Laser-Assisted CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 75 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 129
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- 1986
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